Process for producing radiation-induced self-terminating protective coatings on a substrate
Patent
·
OSTI ID:873733
- Dublin, CA
A gas and radiation are used to produce a protective coating that is substantially void-free on the molecular scale, self-terminating, and degradation resistant. The process can be used to deposit very thin (.apprxeq.5-20 .ANG.) coatings on critical surfaces needing protection from degradative processes including, corrosion and contamination.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- EUV LLC (Santa Clara, CA)
- Patent Number(s):
- US 6231930
- OSTI ID:
- 873733
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
process
producing
radiation-induced
self-terminating
protective
coatings
substrate
gas
radiation
produce
coating
substantially
void-free
molecular
scale
degradation
resistant
deposit
apprxeq
5-20
ang
critical
surfaces
protection
degradative
processes
including
corrosion
contamination
protective coatings
protective coating
substantially void
processes including
/427/
producing
radiation-induced
self-terminating
protective
coatings
substrate
gas
radiation
produce
coating
substantially
void-free
molecular
scale
degradation
resistant
deposit
apprxeq
5-20
ang
critical
surfaces
protection
degradative
processes
including
corrosion
contamination
protective coatings
protective coating
substantially void
processes including
/427/