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Title: Process for producing radiation-induced self-terminating protective coatings on a substrate

Patent ·
OSTI ID:873733

A gas and radiation are used to produce a protective coating that is substantially void-free on the molecular scale, self-terminating, and degradation resistant. The process can be used to deposit very thin (.apprxeq.5-20 .ANG.) coatings on critical surfaces needing protection from degradative processes including, corrosion and contamination.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
DOE Contract Number:
AC04-94AL85000
Assignee:
EUV LLC (Santa Clara, CA)
Patent Number(s):
US 6231930
OSTI ID:
873733
Country of Publication:
United States
Language:
English