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Title: Depth enhancement of ion sensitized data

Patent ·
OSTI ID:873723

A process of fabricating a durable data storage medium is disclosed, the durable data storage medium capable of storing, digital or alphanumeric characters as well as graphical shapes or characters. Additionally, a durable data storage medium including a substrate having etched characters therein is disclosed, the substrate characterized as containing detectable residual amounts of ions used in the preparation process.

Research Organization:
Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
DOE Contract Number:
W-7405-ENG-36
Assignee:
Regents of University of California (Los Alamos, NM)
Patent Number(s):
US 6230071
OSTI ID:
873723
Country of Publication:
United States
Language:
English

References (1)

Force probe characterization using silicon three-dimensional structures formed by focused ion beam lithography journal November 1994