Method and apparatus for thickness measurement using microwaves

Patent · Mon Jan 01 00:00:00 EST 2001

OSTI ID:873592

Woskov, Paul ^[1]; Lamar, David A ^[2]

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1. Bedford, MA
2. West Richland, WA

The method for measuring the thickness of a material which transmits a detectable amount of microwave radiation includes irradiating the material with coherent microwave radiation tuned over a frequency range. Reflected microwave radiation is detected, the reflected radiation having maxima and minima over the frequency range as a result of coherent interference of microwaves reflected from reflecting surfaces of the material. The thickness of the material is determined from the period of the maxima and minima along with knowledge of the index of refraction of the material.

• Research Organization: Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC06-76RL01830
• Assignee: Massachusetts Institute of Technology (Cambridge, MA)
• Patent Number(s): US 6198293
• Application Number: 09/048,595
• OSTI ID: 873592
• Country of Publication: United States
• Language: English

Related Subjects

method
apparatus
thickness
measurement
microwaves
measuring
material
transmits
detectable
amount
microwave
radiation
irradiating
coherent
tuned
frequency
range
reflected
detected
maxima
minima
result
interference
reflecting
surfaces
determined
period
knowledge
index
refraction
reflected radiation
reflecting surfaces
microwave radiation
reflecting surface
frequency range
waves reflected
thickness measurement
coherent microwave
reflected microwave
detectable amount
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