Apparatus and method for the determination of grain size in thin films

Maris, Humphrey J

Title: Apparatus and method for the determination of grain size in thin films

Patent · Mon Jan 01 00:00:00 EST 2001

OSTI ID:873571

Maris, Humphrey J ^[1]

Barrington, RI

A method for the determination of grain size in a thin film sample comprising the steps of measuring first and second changes in the optical response of the thin film, comparing the first and second changes to find the attenuation of a propagating disturbance in the film and associating the attenuation of the disturbance to the grain size of the film. The second change in optical response is time delayed from the first change in optical response.

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Research Organization:: Brown Univ., Providence, RI (United States)

DOE Contract Number:: FG02-86ER45267

Assignee:: Brown University Research Foundation (Providence, RI)

Patent Number(s):: US 6191855

OSTI ID:: 873571

Country of Publication:: United States

Language:: English

References (39)

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apparatus
method
determination
grain
size
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film
sample
comprising
steps
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response
comparing
attenuation
propagating
disturbance
associating
change
time
delayed
time delay
optical response
grain size
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Title: Apparatus and method for the determination of grain size in thin films

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