Method of forming a dielectric thin film having low loss composition of Ba.sub.x Sr.sub.y Ca.sub.1-x-y TiO.sub.3 : Ba.sub.0.12-0.25 Sr.sub.0.35-0.47 Ca.sub.0.32-0.53 TiO.sub.3
Patent
·
OSTI ID:873376
- Alameda, CA
- Berkeley, CA
- Albany, CA
A dielectric thin-film material for microwave applications, including use as a capacitor, the thin-film comprising a composition of barium strontium calcium and titanium of perovskite type (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3. Also provided is a method for making a dielectric thin film of that formula over a wide compositional range through a single deposition process.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- DOE Contract Number:
- AC03-76SF00098
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 6146907
- OSTI ID:
- 873376
- Country of Publication:
- United States
- Language:
- English
A low-loss composition region identified from a thin-film composition spread of (Ba1−x−ySrxCay)TiO3
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journal | February 1999 |
High-Permittivity Perovskite Thin Films for Dynamic Random-Access Memories
|
journal | July 1996 |
Solid Solubility Study of Barium, Strontium, and Calcium Titanates
|
journal | April 1950 |
Discovery of a useful thin-film dielectric using a composition-spread approach
|
journal | March 1998 |
Comparative Study of Amorphous and Crystalline (Ba, Sr)TiO 3 Thin Films Deposited by Laser Ablation
|
journal | September 1993 |
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Low Loss Composition of BA{sub X}SR{sub Y}CA{sub 1-X-Y}TIO{sub 3}:BA{sub 0.12-0.25}SR{sub 0.35-0.47}CA{sub 0.32-0.53}TIO{sub 3}
Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3
Tungsten-doped thin film materials
Patent Application
·
Tue Oct 19 00:00:00 EDT 1999
·
OSTI ID:873376
Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3
Patent
·
Mon Jan 01 00:00:00 EST 2001
·
OSTI ID:873376
Tungsten-doped thin film materials
Patent
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Tue Dec 09 00:00:00 EST 2003
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OSTI ID:873376
+2 more
Related Subjects
method
forming
dielectric
film
loss
composition
sr
1-x-y
12-0
25
35-0
47
32-0
53
thin-film
material
microwave
applications
including
capacitor
comprising
barium
strontium
calcium
titanium
perovskite
type
provided
formula
wide
compositional
range
single
deposition
process
deposition process
film comprising
film material
microwave applications
strontium calcium
thin-film material
thin-film comprising
loss composition
barium strontium
dielectric thin-film
/438/501/
forming
dielectric
film
loss
composition
sr
1-x-y
12-0
25
35-0
47
32-0
53
thin-film
material
microwave
applications
including
capacitor
comprising
barium
strontium
calcium
titanium
perovskite
type
provided
formula
wide
compositional
range
single
deposition
process
deposition process
film comprising
film material
microwave applications
strontium calcium
thin-film material
thin-film comprising
loss composition
barium strontium
dielectric thin-film
/438/501/