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Title: Apparatus and method for sensing motion in a microelectro-mechanical system

Patent ·
OSTI ID:872691
 [1];  [1]
  1. Albuquerque, NM
+ Show Author Affiliations

An apparatus and method are disclosed for optically sensing motion in a microelectromechanical system (also termed a MEMS device) formed by surface micromachining or LIGA. The apparatus operates by reflecting or scattering a light beam off a corrugated surface (e.g. gear teeth or a reference feature) of a moveable member (e.g. a gear, rack or linkage) within the MEMS device and detecting the reflected or scattered light. The apparatus can be used to characterize a MEMS device, measuring one or more performance characteristic such as spring and damping coefficients, torque and friction, or uniformity of motion of the moveable member. The apparatus can also be used to determine the direction and extent of motion of the moveable member; or to determine a particular mechanical state that a MEMS device is in. Finally, the apparatus and method can be used for providing feedback to the MEMS device to improve performance and reliability.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
US 5990473
OSTI ID:
872691
Country of Publication:
United States
Language:
English

References (16)

Surface micromachined microengine journal May 1995
Ultrafine motion detection of micromechanical structures using optical moire patterns journal August 1996
Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrology conference March 1998
LIGA-microtesting system with integrated strain gauges for force measurement
  • Ruther, P.; Bacher, W.; Feit, K.
  • Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots https://doi.org/10.1109/MEMSYS.1997.581924
conference January 1997
Microjet printing of micro-optical waveguides conference January 1996
Micro torque measurements for a prototype turbine journal September 1994
Modeling an optical micromachine probe conference December 1997
Surface-micromachined diffraction gratings for scanning spectroscopic applications conference August 2002
Optical measurement of LIGA milliengine performance conference March 1998
Polymer guided-wave integrated optics: an enabling technology for micro-opto-electro-mechanical systems conference April 1997
In situ friction and wear measurements in integrated polysilicon mechanisms journal February 1990
Optical micro encoder using a twin-beam VCSEL with integrated microlenses conference January 1997
Optical probe for micromachine performance analysis conference April 1997
Friction in surface-micromachined microengines conference May 1996
Optical measurement of micromachine engine performance conference September 1997
Optical methods for characterization of MEMS device motion conference September 1995

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apparatus
method
sensing
motion
microelectro-mechanical
disclosed
optically
microelectromechanical
termed
mems
device
formed
surface
micromachining
liga
operates
reflecting
scattering
light
beam
corrugated
gear
teeth
reference
feature
moveable
rack
linkage
detecting
reflected
scattered
characterize
measuring
performance
characteristic
spring
damping
coefficients
torque
friction
uniformity
determine
direction
extent
particular
mechanical
finally
providing
feedback
improve
reliability
gear teeth
scattered light
light beam
surface micromachining
mems device
improve performance
sensing motion
performance characteristic
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