Smooth diamond films as low friction, long wear surfaces

Gruen, Dieter M; Krauss, Alan R; Erdemir, Ali; Bindal, Cuma; Zuiker, Christopher D

Title: Smooth diamond films as low friction, long wear surfaces

Patent · Fri Jan 01 00:00:00 EST 1999

OSTI ID:872685

Gruen, Dieter M ^[1]; Krauss, Alan R ^[2]; Erdemir, Ali ^[2]; Bindal, Cuma ^[3]; Zuiker, Christopher D ^[4]

Downers Grove, IL
Naperville, IL
Woodridge, IL
LaGrange, IL

An article and method of manufacture of a nanocrystalline diamond film. The nanocrystalline film is prepared by forming a carbonaceous vapor, providing an inert gas containing gas stream and combining the gas stream with the carbonaceous containing vapor. A plasma of the combined vapor and gas stream is formed in a chamber and fragmented carbon species are deposited onto a substrate to form the nanocrystalline diamond film having a root mean square flatness of about 50 nm deviation from flatness in the as deposited state.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

DOE Contract Number:: W-31109-ENG-38

Assignee:: University of Chicago (Chicago, IL)

Patent Number(s):: US 5989511

OSTI ID:: 872685

Country of Publication:: United States

Language:: English

References (19)

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Related Subjects

smooth
diamond
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friction
wear
surfaces
article
method
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nanocrystalline
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prepared
forming
carbonaceous
vapor
providing
inert
gas
containing
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combining
plasma
combined
formed
chamber
fragmented
carbon
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substrate
form
root
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gas containing
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inert gas
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diamond film
diamond films
carbonaceous vapor
root mean
nanocrystalline diamond
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carbon species
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Title: Smooth diamond films as low friction, long wear surfaces

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References (19)

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