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Title: Electrochemical sharpening of field emission tips

Patent ·
OSTI ID:872237

A method for sharpening field emitter tips by electroetching/polishing. In gated field emitters, it is very important to initiate electron emission at the lowest possible voltage and thus the composition of the emitter and the gate, as well as the emitter-gate structure, are important factors. This method of sharpening the emitter tips uses the grid as a counter electrode in electroetching of the emitters, which can produce extremely sharp emitter tips as well as remove asperities and other imperfections in the emitters, each in relation to the specific grid hole in which it resides. This has the effect of making emission more uniform among the emitters as well as lowering the turn-on voltage.

Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
DOE Contract Number:
W-7405-ENG-48
Assignee:
Regents of University of California (Oakland, CA)
Patent Number(s):
US 5891321
OSTI ID:
872237
Country of Publication:
United States
Language:
English

References (3)

Low-voltage field emission from tungsten fiber arrays in a stabilized zirconia matrix journal June 1987
Vacuum microelectronics-1992 journal June 1992
The art and science and other aspects of making sharp tips journal March 1991