Capacitively coupled RF voltage probe having optimized flux linkage
Patent
·
OSTI ID:872133
- Powell, TN
- Maryville, TN
An RF sensor having a novel current sensing probe and a voltage sensing probe to measure voltage and current. The current sensor is disposed in a transmission line to link all of the flux generated by the flowing current in order to obtain an accurate measurement. The voltage sensor is a flat plate which operates as a capacitive plate to sense voltage on a center conductor of the transmission line, in which the measured voltage is obtained across a resistance leg of a R-C differentiator circuit formed by the characteristic impedance of a connecting transmission line and a capacitance of the plate, which is positioned proximal to the center conductor.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Assignee:
- Sematech, Inc. (Austin, TX)
- Patent Number(s):
- US 5867020
- Application Number:
- 08/742,392
- OSTI ID:
- 872133
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
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/324/
coupled
rf
voltage
probe
optimized
flux
linkage
sensor
novel
current
sensing
measure
disposed
transmission
line
link
generated
flowing
obtain
accurate
measurement
flat
plate
operates
capacitive
sense
center
conductor
measured
obtained
resistance
leg
r-c
differentiator
circuit
formed
characteristic
impedance
connecting
capacitance
positioned
proximal
capacitively coupled
voltage sensor
flat plate
transmission line
center conductor
characteristic impedance
current sensing
accurate measurement
current sensor
sensing probe
measured voltage
circuit formed
rf voltage
rf sensor
novel current
measure voltage
voltage sensing
voltage probe
flux generated
flowing current
circuit form
accurate measure
capacitive plate
coupled rf
/324/