Miniature piezo electric vacuum inlet valve

Patent · Tue Mar 24 00:00:00 EST 1998

OSTI ID:871427

Keville, Robert F ^[1]; Dietrich, Daniel D ^[2]

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1. Valley Springs, CA
2. Livermore, CA

A miniature piezo electric vacuum inlet valve having a fast pulse rate and is battery operated with variable flow capability. The low power (<1.6 watts), high pulse rate (<2 milliseconds), variable flow inlet valve is utilized for mass spectroscopic applications or other applications where pulsed or continuous flow conditions are needed. The inlet valve also has a very minimal dead volume of less than 0.01 std/cc. The valve can utilize, for example, a 12 Vdc input/750 Vdc, 3 mA output power supply compared to conventional piezo electric valves which require preloading of the crystal drive mechanism and 120 Vac, thus the valve of the present invention is smaller by a factor of three.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Regents of University of California (Oakland, CA)
• Patent Number(s): US 5730417
• Application Number: 08/650751
• OSTI ID: 871427
• Country of Publication: United States
• Language: English

Related Subjects

miniature
piezo
electric
vacuum
inlet
valve
fast
pulse
rate
battery
operated
variable
flow
capability
power
watts
milliseconds
utilized
mass
spectroscopic
applications
pulsed
continuous
conditions
minimal
dead
volume
01
std
cc
utilize
example
12
vdc
input
750
output
supply
compared
conventional
valves
require
preloading
crystal
drive
mechanism
120
vac
factor
variable flow
inlet valve
dc input
battery operated
drive mechanism
continuous flow
piezo electric
dead volume
power supply
output power
pulse rate
flow conditions
miniature piezo
minimal dead
mass spectroscopic
vacuum inlet
electric vacuum
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