Precision non-contact polishing tool

Patent · Wed Jan 01 00:00:00 EST 1997

OSTI ID:870767

Taylor, John S ^[1]

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1. Livermore, CA

A non-contact polishing tool that combines two orthogonal slurry flow geometries to provide flexibility in altering the shape of the removal footprint. By varying the relative contributions of the two flow geometries, the footprint shape can be varied between the characteristic shapes corresponding to the two independent flow regimes. In addition, the tool can include a pressure activated means by which the shape of the brim of the tool can be varied. The tool can be utilized in various applications, such as x-ray optical surfaces, x-ray lithography, lenses, etc., where stringent shape and finish tolerances are required.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Regents of University of California (Oakland, CA)
• Patent Number(s): US 5591068
• OSTI ID: 870767
• Country of Publication: United States
• Language: English

Related Subjects

precision
non-contact
polishing
tool
combines
orthogonal
slurry
flow
geometries
provide
flexibility
altering
shape
removal
footprint
varying
relative
contributions
varied
characteristic
shapes
corresponding
independent
regimes
addition
pressure
activated
means
brim
utilized
various
applications
x-ray
optical
surfaces
lithography
lenses
etc
stringent
finish
tolerances
required
flow regime
x-ray lithography
various applications
optical surfaces
slurry flow
optical surface
non-contact polishing
flow geometries
x-ray optical
pressure activated
polishing tool
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