Cooled window for X-rays or charged particles

Patent · Mon Jan 01 00:00:00 EST 1996

OSTI ID:870380

Logan, Clinton M ^[1]

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1. Pleasanton, CA

A window that provides good structural integrity and a very high capacity for removal of the heat deposited by x-rays, electrons, or ions, with minimum attenuation of the desired beam. The window is cooled by providing microchannels therein through which a coolant is pumped. For example, the window may be made of silicon with etched microchannels therein and covered by a silicon member. A window made of silicon with a total thickness of 520 .mu.m transmits 96% of the x-rays at an energy of 60 keV, and the transmission is higher than 90% for higher energy photons.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Regents of University of California (Oakland, CA)
• Patent Number(s): US 5509046
• OSTI ID: 870380
• Country of Publication: United States
• Language: English

Related Subjects

cooled
window
x-rays
charged
particles
provides
structural
integrity
capacity
removal
heat
deposited
electrons
minimum
attenuation
desired
beam
providing
microchannels
therein
coolant
pumped
example
silicon
etched
covered
total
thickness
520
transmits
96
energy
60
kev
transmission
90
photons
channels therein
charged particles
charged particle
structural integrity
desired beam
energy photon
energy photons
total thickness
/378/250/