Apparatus for silicon nitride precursor solids recovery

Patent · Tue Apr 04 00:00:00 EDT 1995

OSTI ID:869815

Crosbie, Gary M ^[1]; Predmesky, Ronald L ^[2]; Nicholson, John M ^[3]

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1. Dearborn, MI
2. Livonia, MI
3. Wayne, MI

Method and apparatus are provided for collecting reaction product solids entrained in a gaseous outflow from a reaction situs, wherein the gaseous outflow includes a condensable vapor. A condensate is formed of the condensable vapor on static mixer surfaces within a static mixer heat exchanger. The entrained reaction product solids are captured in the condensate which can be collected for further processing, such as return to the reaction situs. In production of silicon imide, optionally integrated into a production process for making silicon nitride caramic, wherein reactant feed gas comprising silicon halide and substantially inert carrier gas is reacted with liquid ammonia in a reaction vessel, silicon imide reaction product solids entrained in a gaseous outflow comprising residual carrier gas and vaporized ammonia can be captured by forming a condensate of the ammonia vapor on static mixer surfaces of a static mixer heat exchanger.

• Research Organization: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
• DOE Contract Number: 86X-22001C
• Assignee: Ford Motor Company (Dearborn, MI)
• Patent Number(s): US 5403563
• Application Number: 07/926,257
• OSTI ID: 869815
• Country of Publication: United States
• Language: English

Related Subjects

apparatus
silicon
nitride
precursor
solids
recovery
method
provided
collecting
reaction
product
entrained
gaseous
outflow
situs
condensable
vapor
condensate
formed
static
mixer
surfaces
heat
exchanger
captured
collected
processing
return
production
imide
optionally
integrated
process
caramic
reactant
feed
gas
comprising
halide
substantially
inert
carrier
reacted
liquid
ammonia
vessel
residual
vaporized
forming
recovery method
product solids
substantially inert
inert carrier
gaseous outflow
condensable vapor
solids entrained
reactant feed
static mixer
silicon nitride
carrier gas
heat exchange
heat exchanger
reaction product
reaction vessel
feed gas
gas comprising
comprising silicon
reaction situs
production process
solids recovery
collecting reaction
nitride precursor
entrained reaction
precursor solids
/422/55/261/366/