Ion source based on the cathodic arc

Patent · Sat Jan 01 00:00:00 EST 1994

OSTI ID:869141

Sanders, David M ^[1]; Falabella, Steven ^[1]

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1. Livermore, CA

A cylindrically symmetric arc source to produce a ring of ions which leave the surface of the arc target radially and are reflected by electrostatic fields present in the source to a point of use, such as a part to be coated. An array of electrically isolated rings positioned in the source serves the dual purpose of minimizing bouncing of macroparticles and providing electrical insulation to maximize the electric field gradients within the source. The source also includes a series of baffles which function as a filtering or trapping mechanism for any macroparticles.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 5282944
• OSTI ID: 869141
• Country of Publication: United States
• Language: English

Related Subjects

source
based
cathodic
cylindrically
symmetric
produce
leave
surface
target
radially
reflected
electrostatic
fields
coated
array
electrically
isolated
rings
positioned
serves
dual
purpose
minimizing
bouncing
macroparticles
providing
electrical
insulation
maximize
electric
field
gradients
series
baffles
function
filtering
trapping
mechanism
field gradient
field gradients
electrically isolated
electric field
electrical insulation
electrostatic field
providing electrical
electrically isolate
rings positioned
electrostatic fields
cylindrically symmetric
static fields
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