SAW determination of surface area of thin films
Patent
·
OSTI ID:867485
- Albuquerque, NM
N.sub.2 adsorption isotherms are measured from thin films on SAW devices. The isotherms may be used to determine the surface area and pore size distribution of thin films.
- Research Organization:
- AT&T
- DOE Contract Number:
- AC04-76DP00789
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 4947677
- OSTI ID:
- 867485
- Country of Publication:
- United States
- Language:
- English
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