Multilayer optical dielectric coating
- Pleasanton, CA
A highly damage resistant, multilayer, optical reflective coating includes alternating layers of doped and undoped dielectric material. The doping levels are low enough that there are no distinct interfaces between the doped and undoped layers so that the coating has properties nearly identical to the undoped material. The coating is fabricated at high temperature with plasma-assisted chemical vapor deposition techniques to eliminate defects, reduce energy-absorption sites, and maintain proper chemical stoichiometry. A number of differently-doped layer pairs, each layer having a thickness equal to one-quarter of a predetermined wavelength in the material are combined to form a narrowband reflective coating for a predetermined wavelength. Broadband reflectors are made by using a number of narrowband reflectors, each covering a portion of the broadband.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 4925259
- OSTI ID:
- 867373
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
optical
dielectric
coating
highly
damage
resistant
reflective
alternating
layers
doped
undoped
material
doping
levels
distinct
interfaces
properties
nearly
identical
fabricated
temperature
plasma-assisted
chemical
vapor
deposition
techniques
eliminate
defects
reduce
energy-absorption
sites
maintain
proper
stoichiometry
differently-doped
layer
pairs
thickness
equal
one-quarter
predetermined
wavelength
combined
form
narrowband
broadband
reflectors
covering
portion
assisted chemical
reflective coating
predetermined wavelength
alternating layers
chemical vapor
vapor deposition
dielectric material
deposition techniques
doped layer
nearly identical
deposition technique
doped layers
layer pairs
optical reflective
optical dielectric
maintain proper
undoped layer
dielectric coating
doping levels
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