Apparatus and method for photochemical vapor deposition
Abstract
A photochemical vapor deposition apparatus includes a reactor housing having a window in one wall above a reaction chamber in the housing. A transparent curtain divides the reaction chamber into a reaction zone and a flush zone. At least one substrate is mounted in the reaction zone in light communication with the window so that ultraviolet radiation may penetrate through the window into the reaction zone. The window is kept clear by a gas flowing through the flush zone.
- Inventors:
-
- Wilmington, DE
- Publication Date:
- Research Org.:
- Solar Energy Research Institute
- OSTI Identifier:
- 866202
- Patent Number(s):
- US 4654226
- Application Number:
- 06/835,331
- Assignee:
- University of Delaware (Newark, DE)
- DOE Contract Number:
- XB-4-04061
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- apparatus; method; photochemical; vapor; deposition; reactor; housing; window; wall; reaction; chamber; transparent; curtain; divides; zone; flush; substrate; mounted; light; communication; ultraviolet; radiation; penetrate; kept; gas; flowing; ultraviolet radiation; chemical vapor; gas flow; reaction chamber; reaction zone; vapor deposition; gas flowing; deposition apparatus; photochemical vapor; /427/118/
Citation Formats
Jackson, Scott C, and Rocheleau, Richard E. Apparatus and method for photochemical vapor deposition. United States: N. p., 1987.
Web.
Jackson, Scott C, & Rocheleau, Richard E. Apparatus and method for photochemical vapor deposition. United States.
Jackson, Scott C, and Rocheleau, Richard E. 1987.
"Apparatus and method for photochemical vapor deposition". United States. https://www.osti.gov/servlets/purl/866202.
@article{osti_866202,
title = {Apparatus and method for photochemical vapor deposition},
author = {Jackson, Scott C and Rocheleau, Richard E},
abstractNote = {A photochemical vapor deposition apparatus includes a reactor housing having a window in one wall above a reaction chamber in the housing. A transparent curtain divides the reaction chamber into a reaction zone and a flush zone. At least one substrate is mounted in the reaction zone in light communication with the window so that ultraviolet radiation may penetrate through the window into the reaction zone. The window is kept clear by a gas flowing through the flush zone.},
doi = {},
url = {https://www.osti.gov/biblio/866202},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 31 00:00:00 EST 1987},
month = {Tue Mar 31 00:00:00 EST 1987}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.