High efficiency direct detection of ions from resonance ionization of sputtered atoms

Patent · Wed Jan 01 00:00:00 EST 1986

OSTI ID:866095

Gruen, Dieter M ^[1]; Pellin, Michael J ^[2]; Young, Charles E ^[3]

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1. Downers Grove, IL
2. Oak Brook, IL
3. Westmont, IL

A method and apparatus are provided for trace and other quantitative analysis with high efficiency of a component in a sample, with the analysis involving the removal by ion or other bombardment of a small quantity of ion and neutral atom groups from the sample, the conversion of selected neutral atom groups to photoions by laser initiated resonance ionization spectroscopy, the selective deflection of the photoions for separation from original ion group emanating from the sample, and the detection of the photoions as a measure of the quantity of the component. In some embodiments, the original ion group is accelerated prior to the RIS step for separation purposes. Noise and other interference are reduced by shielding the detector from primary and secondary ions and deflecting the photoions sufficiently to avoid the primary and secondary ions.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL (United States)
• DOE Contract Number: W-31109-ENG-38
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4633084
• OSTI ID: 866095
• Country of Publication: United States
• Language: English

Related Subjects

efficiency
direct
detection
resonance
ionization
sputtered
atoms
method
apparatus
provided
trace
quantitative
analysis
component
sample
involving
removal
bombardment
quantity
neutral
atom
conversion
selected
photoions
laser
initiated
spectroscopy
selective
deflection
separation
original
emanating
measure
embodiments
accelerated
prior
ris
step
purposes
noise
interference
reduced
shielding
detector
primary
secondary
deflecting
sufficiently
avoid
resonance ionization
direct detection
quantitative analysis
laser initiated
neutral atom
sputtered atoms
analysis involving
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