Vacuum vapor deposition gun assembly

Patent · Tue Jan 01 00:00:00 EST 1985

OSTI ID:865720

Zeren, Joseph D ^[1]

---

1. Boulder, CO

A vapor deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, a hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.

• Research Organization: Rockwell International Corp., Canoga Park, CA (United States)
• DOE Contract Number: AC04-76DP03533
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4561382
• OSTI ID: 865720
• Country of Publication: United States
• Language: English

Related Subjects

vacuum
vapor
deposition
gun
assembly
hollow
cylindrical
outer
surface
plate
holding
adjustable
heat
sink
hot
cathode
magnets
steering
plasma
crucible
shutter
selectively
covering
uncovering
cylindrical outer
hollow cathode
heat sink
outer surface
vapor deposition
vacuum vapor
cathode gun
gun assembly
hot hollow
deposition gun
/118/219/