Process for the production of ultrahigh purity silane with recycle from separation columns
Patent
·
OSTI ID:864275
- Tonawanda, NY
Tri- and dichlorosilanes formed by hydrogenation in the course of the reaction of metallurgical silicon, hydrogen and recycle silicon tetrachloride are employed as feed into a separation column arrangement of sequential separation columns and redistribution reactors which processes the feed into ultrahigh purity silane and recycle silicon tetrachloride. A slip stream is removed from the bottom of two sequential columns and added to the recycle silicon tetrachloride process stream causing impurities in the slip streams to be subjected to reactions in the hydrogenation step whereby waste materials can be formed and readily separated.
- Assignee:
- Union Carbide Corporation (New York, NY)
- Patent Number(s):
- US 4340574
- Application Number:
- 06/182,148
- OSTI ID:
- 864275
- Country of Publication:
- United States
- Language:
- English
Similar Records
Establishment of the feasibility of a process capable of low-cost, high-volume production of silane (Step I) and the pyrolysis of silane to semiconductor-grade silicon (Step II). Low Cost Silicon Solar Array Project, Silicon Materials Task. Quarterly progress report, July--September 1977
Establishment of the feasibility of a process capable of low cost, high volume production of silane (Phase I), and the pyrolysis of silane to semiconductor-grade silicon (Phase II). Low Cost Silicon Solar Array Project, Task I. Quarterly progress report, April--June 1977
Low cost silicon solar array project. Establishment of the feasibility of a process capable of low cost, high volume production of silane (Phase I), and the pyrolysis of silane to semiconductor-grade silicon (Phase II). Quarterly progress report, January--March 1977
Technical Report
·
Sun Jan 01 00:00:00 EST 1978
·
OSTI ID:864275
Establishment of the feasibility of a process capable of low cost, high volume production of silane (Phase I), and the pyrolysis of silane to semiconductor-grade silicon (Phase II). Low Cost Silicon Solar Array Project, Task I. Quarterly progress report, April--June 1977
Technical Report
·
Sat Oct 01 00:00:00 EDT 1977
·
OSTI ID:864275
+1 more
Low cost silicon solar array project. Establishment of the feasibility of a process capable of low cost, high volume production of silane (Phase I), and the pyrolysis of silane to semiconductor-grade silicon (Phase II). Quarterly progress report, January--March 1977
Technical Report
·
Sat Jan 01 00:00:00 EST 1977
·
OSTI ID:864275
+1 more
Related Subjects
process
production
ultrahigh
purity
silane
recycle
separation
columns
tri-
dichlorosilanes
formed
hydrogenation
course
reaction
metallurgical
silicon
hydrogen
tetrachloride
employed
feed
column
arrangement
sequential
redistribution
reactors
processes
slip
stream
removed
bottom
added
causing
impurities
streams
subjected
reactions
step
whereby
waste
materials
readily
separated
readily separated
separation column
process stream
waste material
waste materials
slip stream
separation columns
purity silane
metallurgical silicon
hydrogenation step
separation colum
/423/203/
production
ultrahigh
purity
silane
recycle
separation
columns
tri-
dichlorosilanes
formed
hydrogenation
course
reaction
metallurgical
silicon
hydrogen
tetrachloride
employed
feed
column
arrangement
sequential
redistribution
reactors
processes
slip
stream
removed
bottom
added
causing
impurities
streams
subjected
reactions
step
whereby
waste
materials
readily
separated
readily separated
separation column
process stream
waste material
waste materials
slip stream
separation columns
purity silane
metallurgical silicon
hydrogenation step
separation colum
/423/203/