Cathodic arc plasma deposition
Journal Article
·
· Vacuum Technology & Coating
OSTI ID:810482
No abstract prepared.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Administrator for National Nuclear Security Admin. Nonproliferation and National Security Program Direction (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 810482
- Report Number(s):
- LBNL-49915; R&D Project: Z2N110; TRN: US0302793
- Journal Information:
- Vacuum Technology & Coating, Vol. 3; Other Information: Journal Publication Date: May 2002; PBD: 30 May 2002
- Country of Publication:
- United States
- Language:
- English
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