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Title: Cathodic arc plasma deposition

Journal Article · · Vacuum Technology & Coating
OSTI ID:810482

No abstract prepared.

Research Organization:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
Administrator for National Nuclear Security Admin. Nonproliferation and National Security Program Direction (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
810482
Report Number(s):
LBNL-49915; R&D Project: Z2N110; TRN: US0302793
Journal Information:
Vacuum Technology & Coating, Vol. 3; Other Information: Journal Publication Date: May 2002; PBD: 30 May 2002
Country of Publication:
United States
Language:
English

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