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Title: RF Electron-Beam-Driven Plasma Radiation Source for EUV Lithography and High Resolution Radiography of Containment Vessels

Authors:
 [1];
  1. Los Alamos National Laboratory
Publication Date:
Research Org.:
Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
770485
Report Number(s):
LA-CRADA-97-11; LA-CRADA-97-0011
CRADA No. LA93C10102
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English

Citation Formats

Fulton, Robert Douglas, and Todd, Alan. RF Electron-Beam-Driven Plasma Radiation Source for EUV Lithography and High Resolution Radiography of Containment Vessels. United States: N. p., 1997. Web. doi:10.2172/770485.
Fulton, Robert Douglas, & Todd, Alan. RF Electron-Beam-Driven Plasma Radiation Source for EUV Lithography and High Resolution Radiography of Containment Vessels. United States. https://doi.org/10.2172/770485
Fulton, Robert Douglas, and Todd, Alan. 1997. "RF Electron-Beam-Driven Plasma Radiation Source for EUV Lithography and High Resolution Radiography of Containment Vessels". United States. https://doi.org/10.2172/770485. https://www.osti.gov/servlets/purl/770485.
@article{osti_770485,
title = {RF Electron-Beam-Driven Plasma Radiation Source for EUV Lithography and High Resolution Radiography of Containment Vessels},
author = {Fulton, Robert Douglas and Todd, Alan},
abstractNote = {},
doi = {10.2172/770485},
url = {https://www.osti.gov/biblio/770485}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jul 28 00:00:00 EDT 1997},
month = {Mon Jul 28 00:00:00 EDT 1997}
}