RF Electron-Beam-Driven Plasma Radiation Source for EUV Lithography and High Resolution Radiography of Containment Vessels
- Authors:
-
- Los Alamos National Laboratory
- Publication Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 770485
- Report Number(s):
- LA-CRADA-97-11; LA-CRADA-97-0011
CRADA No. LA93C10102
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Technical Report
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Fulton, Robert Douglas, and Todd, Alan. RF Electron-Beam-Driven Plasma Radiation Source for EUV Lithography and High Resolution Radiography of Containment Vessels. United States: N. p., 1997.
Web. doi:10.2172/770485.
Fulton, Robert Douglas, & Todd, Alan. RF Electron-Beam-Driven Plasma Radiation Source for EUV Lithography and High Resolution Radiography of Containment Vessels. United States. https://doi.org/10.2172/770485
Fulton, Robert Douglas, and Todd, Alan. 1997.
"RF Electron-Beam-Driven Plasma Radiation Source for EUV Lithography and High Resolution Radiography of Containment Vessels". United States. https://doi.org/10.2172/770485. https://www.osti.gov/servlets/purl/770485.
@article{osti_770485,
title = {RF Electron-Beam-Driven Plasma Radiation Source for EUV Lithography and High Resolution Radiography of Containment Vessels},
author = {Fulton, Robert Douglas and Todd, Alan},
abstractNote = {},
doi = {10.2172/770485},
url = {https://www.osti.gov/biblio/770485},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jul 28 00:00:00 EDT 1997},
month = {Mon Jul 28 00:00:00 EDT 1997}
}
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