Miniaturized Environmental Monitoring Instrumentation
The objective of the Mass Spectrograph on a Chip (MSOC) program is the development of a miniature, multi-species gas sensor fabricated using silicon micromachining technology which will be orders of magnitude smaller and lower power consumption than a conventional mass spectrometer. The sensing and discrimination of this gas sensor are based on an ionic mass spectrograph, using magnetic and/or electrostatic fields. The fields cause a spatial separation of the ions according to their respective mass-to-charge ratio. The fabrication of this device involves the combination of microelectronics with micromechanically built sensors and, ultimately, vacuum pumps. The prototype of a chemical sensor would revolutionize the method of performing environmental monitoring for both commercial and government applications. The portable unit decided upon was the miniaturized gas chromatograph with a mass spectrometer detector, referred to as a GC/MS in the analytical marketplace.
- Research Organization:
- USDOE Idaho Operations Office, Idaho Falls, ID; Northrop Grumman Corporation, Baltimore, MD (US)
- Sponsoring Organization:
- USDOE Office of Environmental Management (EM) (US)
- DOE Contract Number:
- FC07-94ID13292
- OSTI ID:
- 756585
- Report Number(s):
- DOE/ID/13292; TRN: AH200029%%18
- Resource Relation:
- Other Information: PBD: 1 Sep 1997
- Country of Publication:
- United States
- Language:
- English
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