In situ real-time studies of oxygen incorporation in complex oxide thin films using spectroscopic ellipsometry and ion scattering and recoil spectrometry
The surface termination of c-axis oriented YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} (YBCO) and the oxygen incorporation mechanism has been investigated using a unique combination of spectroscopic ellipsometry (SE) and time of flight ion scattering and recoil spectrometry (ToF-ISARS). The high surface sensitivity of the ToF-ISARS technique combined with the bulk oxygen sensitivity of SE are shown to yield complimentary information. The SE provided the film orientation and quality, while ToF-ISARS supplied surface compositional and structural information and enabled isotopic {sup 18}O tracer studies. It was determined that the O content of the film had little effect on the surface termination of the film, indicating a lack of labile Cu(1) sites at the c-axis oriented YBCO surface. Also, strong evidence for a Ba or BaO terminated structure is shown. The data related to the {sup 18}O tracer studies indicate that O from the reaction ambient incorporates only into the labile Cu(1) sites during both deposition and annealing, while stable O sites were populated with O from the sputtered target, indicating either the need for sputtered atomic O or sputtered YCuO complexes to occupy the stable Cu(2) sites.
- Research Organization:
- Argonne National Lab., IL (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 755892
- Report Number(s):
- ANL/MSD/CP-101998; TRN: US0003638
- Resource Relation:
- Conference: 2000 MRS Spring Meeting, San Francisco, CA (US), 04/24/2000--04/28/2000; Other Information: PBD: 25 May 2000
- Country of Publication:
- United States
- Language:
- English
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