Ion Implantation Processing Technologies for Telecommunications Electronics
The subject CRADA was a collaboration between Oak Ridge National Laboratory and Bell Laboratories, Lucent Technologies (formerly AT and T Bell Laboratories) to explore the development of ion implantation technologies for silicon integrated circuit (IC) manufacturing.
- Research Organization:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Organization:
- USDOE Office of Science (US)
- DOE Contract Number:
- AC05-00OR22725
- OSTI ID:
- 755647
- Report Number(s):
- C/ORNL94-0270; TRN: AH200124%%100
- Resource Relation:
- Other Information: PBD: 1 May 2000
- Country of Publication:
- United States
- Language:
- English
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