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Title: Characterization of oxynitride dielectric films grown in NO/O{sub 2} mixtures by rapid thermal oxynitridation

Abstract

Ultra-thin oxynitride films were grown on Si by direct rapid thermal processing (RTP) oxynitridation in NO/O{sub 2} ambients with NO concentrations from 5% to 50%. During oxynitridation, nitrogen accumulated at the Si/dielectric interface and the average concentration of in N through the resulting films ranged from 0.3 to 3.0 atomic percent. The average concentration of N in the films increased with increasing NO in the ambient gas, but decreased with longer RTP times. The maximum N concentration remained relatively constant for all RTP times and a given NO/O{sub 2} ambient. Re-oxidation following oxynitridation altered L the N profile and improved the electrical characteristics, with an optimal NO/O{sub 2} mixture in the range of 10% to 25% NO. Re-oxidation by RTP improves the electrical characteristics with respect to the films that were not re-oxidized and produces only slight changes in the N distribution or maximum concentration. The electrical results also indicate that oxynitride films are superior to comparably grown oxide films.

Authors:
; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
752159
Report Number(s):
SAND2000-0507C
TRN: AH200018%%324
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: 197th Meeting of the Electrochemical Society/Fourth International Symposium on the Physics and Chemistry of SiO2 and the SiO2 Interface, Toronto, Ontario (CA), 05/14/2000--05/19/2000; Other Information: PBD: 29 Feb 2000
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; THIN FILMS; SUBSTRATES; SILICON; DIELECTRIC MATERIALS; INTERFACES; CHEMICAL COMPOSITION; ELECTRICAL PROPERTIES; NITROGEN COMPOUNDS; OXYGEN COMPOUNDS

Citation Formats

EVERIST, SARAH C, MEISENHEIMER, TIMOTHY L, NELSON, GERALD C, and SMITH, PAUL M. Characterization of oxynitride dielectric films grown in NO/O{sub 2} mixtures by rapid thermal oxynitridation. United States: N. p., 2000. Web.
EVERIST, SARAH C, MEISENHEIMER, TIMOTHY L, NELSON, GERALD C, & SMITH, PAUL M. Characterization of oxynitride dielectric films grown in NO/O{sub 2} mixtures by rapid thermal oxynitridation. United States.
EVERIST, SARAH C, MEISENHEIMER, TIMOTHY L, NELSON, GERALD C, and SMITH, PAUL M. 2000. "Characterization of oxynitride dielectric films grown in NO/O{sub 2} mixtures by rapid thermal oxynitridation". United States. https://www.osti.gov/servlets/purl/752159.
@article{osti_752159,
title = {Characterization of oxynitride dielectric films grown in NO/O{sub 2} mixtures by rapid thermal oxynitridation},
author = {EVERIST, SARAH C and MEISENHEIMER, TIMOTHY L and NELSON, GERALD C and SMITH, PAUL M},
abstractNote = {Ultra-thin oxynitride films were grown on Si by direct rapid thermal processing (RTP) oxynitridation in NO/O{sub 2} ambients with NO concentrations from 5% to 50%. During oxynitridation, nitrogen accumulated at the Si/dielectric interface and the average concentration of in N through the resulting films ranged from 0.3 to 3.0 atomic percent. The average concentration of N in the films increased with increasing NO in the ambient gas, but decreased with longer RTP times. The maximum N concentration remained relatively constant for all RTP times and a given NO/O{sub 2} ambient. Re-oxidation following oxynitridation altered L the N profile and improved the electrical characteristics, with an optimal NO/O{sub 2} mixture in the range of 10% to 25% NO. Re-oxidation by RTP improves the electrical characteristics with respect to the films that were not re-oxidized and produces only slight changes in the N distribution or maximum concentration. The electrical results also indicate that oxynitride films are superior to comparably grown oxide films.},
doi = {},
url = {https://www.osti.gov/biblio/752159}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 29 00:00:00 EST 2000},
month = {Tue Feb 29 00:00:00 EST 2000}
}

Conference:
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