Micromachined Systems-on-a-Chip: Infrastructure, Technology and Applications
A review is made of the infrastructure, technology and capabilities of Sandia National Laboratories for the development of micromechanical systems that have potential space applications. By incorporating advanced fabrication processes, such as chemical mechanical polishing, and several mechanical polysilicon levels, the range' of rrticromechanical systems that can be fabricated in these technologies is virtually limitless. Representative applications include a micro- engine driven mirror, and a micromachined lock. Using a novel integrated MEM!YCMOS technology, a six degree-of-freedom accelerometer/gyroscope system has been designed by researchers at U.C. Berkeley and fabricated on the same silicon chip as the CMOS control circuits to produce an integrated micro-navigational unit.
- Research Organization:
- Sandia National Laboratories, Albuquerque, NM, and Livermore, CA (US)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 742
- Report Number(s):
- SAND-98-2069C
- Resource Relation:
- Conference: NonoSpace 98, League City, TX, 11/01/1998
- Country of Publication:
- United States
- Language:
- English
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