Improved assembly processes for the Quartz Digital Accelerometer cantilever

Technical Report · Sun Jul 01 00:00:00 EDT 1990

DOI:https://doi.org/10.2172/6632695· OSTI ID:6632695

Romero, A M; Gebert, C T

This report covers the development of improved assembly processes for the Quartz Digital Accelerometer cantilever. In this report we discuss improved single-assembly tooling, the development of tooling and processes for precision application of polyimide adhesive, the development of the wafer scale assembly procedure, and the application of eutectic bonding to cantilever assembly. 2 refs., 17 figs.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: DOE/AD
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6632695
• Report Number(s): SAND-89-0913; ON: DE91000096
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
47 OTHER INSTRUMENTATION
DIGITAL CIRCUITS
FABRICATION
ACCELEROMETERS
BONDING
ELECTRODES
EUTECTICS
QUARTZ
TUNING
CHALCOGENIDES
ELECTRONIC CIRCUITS
JOINING
MEASURING INSTRUMENTS
MINERALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
SILICON COMPOUNDS
SILICON OXIDES
426000* - Engineering- Components
Electron Devices & Circuits- (1990-)
440800 - Miscellaneous Instrumentation- (1990-)