Concurrent design of an RTP chamber and advanced control system

Conference · Sun Dec 31 00:00:00 EST 1995

OSTI ID:663246

Spence, P ^[1]; Schaper, C ^[2]; Kermani, A ^[3]

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1. Sandia National Labs., Livermore, CA (United States)
2. Microelectronics Control and Sensing, Inc., Mountain View, CA (United States)
3. CVC Products, Inc., Fremont, CA (United States)

A concurrent-engineering approach is applied to the development of an axisymmetric rapid-thermal-processing (RTP) reactor and its associated temperature controller. Using a detailed finite-element thermal model as a surrogate for actual hardware, the authors have developed and tested a multi-input multi-output (MIMO) controller. Closed-loop simulations are performed by linking the control algorithm with the finite-element code. Simulations show that good temperature uniformity is maintained on the wafer during both steady and transient conditions. A numerical study shows the effect of ramp rate, feedback gain, sensor placement, and wafer-emissivity patterns on system performance.

• Research Organization: Sandia National Lab. (SNL-CA), Livermore, CA (United States)
• Sponsoring Organization: USDOE Assistant Secretary for Human Resources and Administration, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 663246
• Report Number(s): SAND-95-8580C; CONF-950412-; ON: DE98006446; TRN: AHC29818%%78
• Resource Relation: Conference: Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 17-21 Apr 1995; Other Information: PBD: [1995]
• Country of Publication: United States
• Language: English

Related Subjects

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES
CHEMICAL REACTORS
TEMPERATURE CONTROL
CONTROL SYSTEMS
FINITE ELEMENT METHOD
NUMERICAL ANALYSIS
INTEGRATED CIRCUITS
MANUFACTURING
COMPUTER-AIDED DESIGN
PROCESS CONTROL
ON-LINE MEASUREMENT SYSTEMS