The Brookhaven Superconducting X-Ray Lithography Source (SXLS)

Conference · Mon Jan 01 00:00:00 EST 1990

OSTI ID:6630859

Murphy, J B; Blumberg, L N; Bozoki, E; Desmond, E; Galayda, J; Halama, H; Heese, R; Hsieh, H; Keane, J; Kramer, S; Mortazavi, P; Schuchman, J; Sharma, S; Singh, O; Solomon, L; Thomas, M; Wang, J M ^[1]; Kalsi, S; Reusch, M; Rose, J ^[2] ; Moser, H O ^[3]

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1. Brookhaven National Lab., Upton, NY (USA)
2. Grumman Aerospace Corp., Bethpage, NY (USA)
3. Kernforschungszentrum Karlsruhe GmbH (Germany, F.R.)

Synchrotron radiation from dipole magnets in electron storage rings has emerged as a useful source of x-rays for lithography. The goal of the SXLS Project at BNL is to design and construct a compact storage ring of circumference, C = 8.503 meters. It will use superconducting dipoles with a field of B{sub 0} = 3.87 Tesla and bending radius of {rho} = .6037 meters along with 700 MeV electrons to produce 10 angstrom x-rays for lithography. The project is proceeding in two phases: in Phase I low field iron dipoles are being used; in Phase II the low field dipoles will be replaced with superconducting dipoles. An overview of the design and status report are presented.

• Research Organization: Brookhaven National Lab., Upton, NY (USA)
• Sponsoring Organization: USDOD
• DOE Contract Number: AC02-76CH00016
• OSTI ID: 6630859
• Report Number(s): BNL-43928; CONF-900603-35; ON: DE91000120; TRN: 90-031551
• Resource Relation: Conference: 2. European particle accelerator conference, Nice (France), 11-16 Jun 1990
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
X-RAY SOURCES
DESIGN
CONTROL SYSTEMS
MAGNETIC DIPOLES
RF SYSTEMS
STORAGE RINGS
SUPERCONDUCTING MAGNETS
SYNCHROTRON RADIATION SOURCES
VACUUM SYSTEMS
DIPOLES
ELECTRICAL EQUIPMENT
ELECTROMAGNETS
EQUIPMENT
MAGNETS
MULTIPOLES
RADIATION SOURCES
SUPERCONDUCTING DEVICES
X-RAY EQUIPMENT
430400* - Particle Accelerators- Storage Rings