A novel non-contact profiler design for measuring synchrotron radiation mirrors

Conference · Wed Aug 01 00:00:00 EDT 1990

OSTI ID:6616748

Lin, Yao; Takacs, P Z; Furenlid, K; DeBiasse, R A ^[1]; Wang, Run-Wen ^[2]

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1. Brookhaven National Lab., Upton, NY (USA)
2. Academia Sinica, Shanghai, SH (China). Shanghai Inst. of Optics and Fine Mechanics

A novel optical profiler is described in this paper for measurement of surface profiles of synchrotron radiation (SR) mirrors. The measurement is based on a combination of an optical heterodyne technique and a precise phase measurement procedure without a reference surface. A Zeeman two-frequency He-Ne laser is employed as the light source. The common-path optical system, which uses a birefringent lens as the beam splitter, minimizes the effects of air turbulence, sample vibration and temperature variation. A special autofocus system allows the profiler to measure the roughness and shape of a sample surface. The optical system is mounted on a large linear air-bearing slide, and is capable of scanning over distances covering the spatial period range from several microns to nearly one meter with a high measurement accuracy. 9 refs., 5 figs.

• Research Organization: Brookhaven National Lab., Upton, NY (USA)
• Sponsoring Organization: DOE/ER
• DOE Contract Number: AC02-76CH00016
• OSTI ID: 6616748
• Report Number(s): BNL-44959; CONF-900756-39; ON: DE90017202; TRN: 90-029462
• Resource Relation: Conference: SPIE's international symposium on optical and optoelectronic applied science and engineering exhibit, San Diego, CA (USA), 8-13 Jul 1990
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
MIRRORS
MEASURING METHODS
BEAM SPLITTING
DESIGN
FOCUSING
HELIUM-NEON LASERS
OPTICAL SYSTEMS
ROUGHNESS
SURFACE PROPERTIES
SYNCHROTRON RADIATION
BREMSSTRAHLUNG
ELECTROMAGNETIC RADIATION
GAS LASERS
LASERS
RADIATIONS
430303* - Particle Accelerators- Experimental Facilities & Equipment
440101 - Radiation Instrumentation- General Detectors or Monitors & Radiometric Instruments