Two dimensional CCD (charged coupled device) arrays as parallel detectors in electron energy loss and x-ray wavelength dispersive spectroscopy
Conference
·
OSTI ID:6546403
Parallel detection systems for spectroscopy have generally been based upon linear detector arrays. Replacing the linear arrays with two dimensional systems yields more complicated devices; however, there are corresponding benefits which can be realized for both x-ray and electron energy loss spectroscopy. The operational design of these systems, as well as preliminary results from the construction of such a device used for electron spectroscopy, are presented. 10 refs., 8 figs.
- Research Organization:
- Argonne National Lab., IL (USA)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 6546403
- Report Number(s):
- CONF-8802127-2; ON: DE89003653; TRN: 89-002354
- Resource Relation:
- Conference: Workshop on electron-beam induced spectroscopies at very high spatial resolution, Aussois, France, 29 Feb 1988; Other Information: Portions of this document are illegible in microfiche products
- Country of Publication:
- United States
- Language:
- English
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