Investigation of PACVD protective coating processes using advanced diagnostics techniques

Technical Report · Fri May 07 00:00:00 EDT 1993

DOI:https://doi.org/10.2172/6516415· OSTI ID:6516415

Roman, W C

Objective is to understand the mechanisms governing nonequilibrium plasma atomistic or molecular deposition of hard face coatings. Laser diagnostic methods include coherent anti-Stokes Raman spectroscopy (CARS) and laser-induced fluorescence. TiB[sub 2] and diamonds were used as the hard face coating materials. Diborane was used as precursor to TiB[sub 2].

• Research Organization: United Technologies Research Center, East Hartford, CT (United States)
• Sponsoring Organization: USDOE; USDOE, Washington, DC (United States)
• DOE Contract Number: FG02-86ER13560
• OSTI ID: 6516415
• Report Number(s): DOE/ER/13560-7; ON: DE93013978
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
DIAMONDS
CHEMICAL VAPOR DEPOSITION
HARD FACING
TITANIUM BORIDES
BORANES
BORON HYDRIDES
PLASMA
RAMAN SPECTROSCOPY
BORIDES
BORON COMPOUNDS
CARBON
CHEMICAL COATING
DEPOSITION
ELEMENTAL MINERALS
ELEMENTS
HYDRIDES
HYDROGEN COMPOUNDS
LASER SPECTROSCOPY
MINERALS
NONMETALS
SPECTROSCOPY
SURFACE COATING
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360601 - Other Materials- Preparation & Manufacture