Improved Design of Optical MEMS Using the SUMMiT Fabrication Process
This paper describes the design and fabrication of optical Microelectromechanical Systems (MEMS) devices using the Sandia Ultra planar Multilevel MEMS Technology (SUMMiT) fabrication process. This state of the art process, offered by Sandia National Laboratories, provides unique and very advantageous features which make it ideal for optical devices. This enabling process permits the development of micromirror devices with near ideal characteristics which have previously been unrealizable in standard polysilicon processes. This paper describes such characteristics as elevated address electrodes, individual address wiring beneath the device, planarized mirror surfaces, unique post-process metallization, and the best active surface area to date.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE Office of Financial Management and Controller, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 627516
- Report Number(s):
- SAND-97-2997C; CONF-980514-; ON: DE98001369; TRN: AD-a340 576
- Resource Relation:
- Conference: WAC `98: world automation congress, Anchorage, AK (United States), 10-14 May 1998; Other Information: PBD: 1997
- Country of Publication:
- United States
- Language:
- English
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