Report of the workshop on transferring X-ray Lithography Synchrotron (XLS) technology to industry

Conference · Thu Jan 01 00:00:00 EST 1987

OSTI ID:6132292

Marcuse, W

This paper reports on plans to develop an x-ray synchrotron for use in lithography. The primary concern of the present paper is technology transfer from national laboratories to private industry. (JDH)

• Research Organization: Brookhaven National Lab., Upton, NY (USA)
• DOE Contract Number: AC02-76CH00016
• OSTI ID: 6132292
• Report Number(s): BNL-52096; CONF-8707102-Summ.; ON: DE87014301
• Resource Relation: Conference: Workshop on transferring X-ray lithography synchrotron (XLS) technology to industry, Upton, NY, USA, 8 Jul 1987; Other Information: Portions of this document are illegible in microfiche products. Original copy available until stock is exhausted
• Country of Publication: United States
• Language: English

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