Synthesis and properties of layered synthetic microstructure (LSM) dispersion elements for 62 eV (200A) to 1. 24 keV (10A) radiation. Final report
The opportunities offered by engineered synthetic multilayer dispersion elements for x-rays have been recognized since the earliest days of x-ray diffraction analysis. In this paper, application of sputter deposition technology to the synthesis of Layered Synthetic Microstructure (LSMs) of sufficient quality for use as x-ray dispersion elements is discussed. It will be shown that high efficiency, controllable bandwidth dispersion elements, with d spacings varying from 15 A to 180 A, may be synthesized onto both mechanically stiff and flexible substrates. Multilayer component materials include tungsten, niobium, molybdenum, titanium, vanadium, and silicon layers separated by carbon layers. Experimental observations of peak reflectivity in first order, integrated reflectivity in first order, and diffraction performance at selected photon energies in the range, 100 to 15,000 eV, will be reported and compared to theory.
- Research Organization:
- Stanford Univ., CA (USA). Dept. of Materials Science and Engineering
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 6071333
- Report Number(s):
- UCRL-15393; ON: DE82001671; TRN: 82-000634
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
CARBON
SPUTTERING
MOLYBDENUM
NIOBIUM
SILICON
TITANIUM
TUNGSTEN
DEPOSITION
LAYERS
VANADIUM
EXPERIMENTAL DATA
FILMS
MICROSTRUCTURE
X-RAY DIFFRACTION
COHERENT SCATTERING
CRYSTAL STRUCTURE
DATA
DIFFRACTION
ELEMENTS
INFORMATION
METALS
NONMETALS
NUMERICAL DATA
REFRACTORY METALS
SCATTERING
SEMIMETALS
TRANSITION ELEMENTS
360101* - Metals & Alloys- Preparation & Fabrication
360102 - Metals & Alloys- Structure & Phase Studies