Evaluation of CVD silicon carbide for synchrotron radiation mirrors
Chemical vapor deposited silicon carbide (CVD SiC) is a recent addition to the list of materials suitable for use in the harsh environment of synchrotron radiation (SR) beam lines. SR mirrors for use at normal incidence must be ultrahigh vacuum compatible, must withstand intense x-ray irradiation without surface damage, must be capable of being polished to an extremely smooth surface finish, and must maintain surface figure under thermal loading. CVD SiC exceeds the performance of conventional optical materials in all these areas. It is, however, a relatively new optical material. Few manufacturers have experience in producing optical quality material, and few opticians have experience in figuring and polishing the material. The CVD material occurs in a variety of forms, sensitively dependent upon reaction chamber production conditions. We are evaluating samples of CVD SiC obtained commercially from various manufacturers, representing a range of deposition conditions, to determine which types of CVD material are most suitable for superpolishing. At the time of this writing, samples are being polished by several commercial vendors and surface finish characteristics are being evaluated by various analytical methods.
- Research Organization:
- Brookhaven National Lab., Upton, NY (USA)
- DOE Contract Number:
- AC02-76CH00016
- OSTI ID:
- 5973022
- Report Number(s):
- BNL-29847; CONF-810750-8; ON: DE82000778; TRN: 82-001739
- Resource Relation:
- Conference: 2. national conference on synchrotron radiation instrumentation, Ithaca, NY, USA, 15 Jul 1981
- Country of Publication:
- United States
- Language:
- English
Similar Records
Large Nuclear Detector Array Interconnection by Direct-Write Laser Chemical Vapor Deposition (CVD)
Thermally stable, silicon carbide mirror material for synchrotron x-ray beamline optics
Related Subjects
43 PARTICLE ACCELERATORS
SILICON CARBIDES
CHEMICAL VAPOR DEPOSITION
OPTICAL PROPERTIES
SYNCHROTRON RADIATION
MIRRORS
FABRICATION
PHYSICAL RADIATION EFFECTS
REFLECTIVITY
BREMSSTRAHLUNG
CARBIDES
CARBON COMPOUNDS
CHEMICAL COATING
DEPOSITION
ELECTROMAGNETIC RADIATION
PHYSICAL PROPERTIES
RADIATION EFFECTS
RADIATIONS
SILICON COMPOUNDS
SURFACE COATING
SURFACE PROPERTIES
360204* - Ceramics
Cermets
& Refractories- Physical Properties
430301 - Particle Accelerators- Ion Sources