Development of Nomarski microscopy for quantitative determination of surface topography

Conference · Mon Jan 01 00:00:00 EST 1979

OSTI ID:5710073

Hartman, J. S.; Gordon, R. L.; Lessor, D. L.

The use of Nomarski differential interference contrast (DIC) microscopy has been extended to provide nondestructive, quantitative analysis of a sample's surface topography. Theoretical modeling has determined the dependence of the image intensity on the microscope's optical components, the sample's optical properties, and the sample's surface orientation relative to the microscope. Results include expressions to allow the inversion of image intensity data to determine sample surface slopes. A commercial Nomarski system has been modified and characterized to allow the evaluation of the optical model. Data have been recorded with smooth, planar samples that verify the theoretical predictions.

• Research Organization: Battelle Pacific Northwest Labs., Richland, WA (USA)
• DOE Contract Number: EY-76-C-06-1830
• OSTI ID: 5710073
• Report Number(s): PNL-SA-7718; CONF-790838-3
• Resource Relation: Conference: 23. annual international symposium of the Society of Photographic Instrumentation Engineers, San Diego, CA, USA, 27 Aug 1979
• Country of Publication: United States
• Language: English

Related Subjects

47 OTHER INSTRUMENTATION
OPTICAL MICROSCOPES
CALIBRATION
MODIFICATIONS
OPERATION
SURFACES
TOPOGRAPHY
LASER MIRRORS
NONDESTRUCTIVE TESTING
OPTICAL PROPERTIES
MATERIALS TESTING
MICROSCOPES
PHYSICAL PROPERTIES
TESTING
440300* - Miscellaneous Instruments- (-1989)