Scanning Tunneling Microscopy Studies of the Surfaces of a-Si:H and a-SiGe:H, Annual Subcontract Report, 1 December 1989 - 31 January 1991
The report contains a detailed description of the experimental complexities encountered in developing scanning tunneling microscope (STM) probing of atomic structure on the surface of freshly-grown hydrogenated-amorphous semiconductors. It also contains a speculative microscopic film-growth model that explains differences between the disorder in CVD grown a-Ge:H versus a-Si:H films. This model is derived from prior results obtained in the chemical analysis of GeH{sub 4} plasmas, combined with surface reaction and thermodynamic considerations. The neutral radical fragments of silane, disilane and germane dissociation in discharges, which dominate the vapor and film-growth reactions, have been deduced from detailed analysis of prior data and are reported. 4 refs., 7 figs.
- Research Organization:
- National Renewable Energy Lab. (NREL), Golden, CO (United States)
- Sponsoring Organization:
- USDOE Office of Energy Efficiency and Renewable Energy (EERE)
- DOE Contract Number:
- AC36-08GO28308
- OSTI ID:
- 5681404
- Report Number(s):
- SERI/TP-214-4409; ON: DE91002169
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
GERMANIUM COMPOUNDS
MICROSTRUCTURE
SILICON COMPOUNDS
AMORPHOUS STATE
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
ELECTRIC DISCHARGES
ETCHING
HYDROGEN COMPOUNDS
PROGRESS REPORT
SCANNING ELECTRON MICROSCOPY
SILANES
SOLAR CELLS
STOICHIOMETRY
THIN FILMS
CHEMICAL COATING
CRYSTAL STRUCTURE
DEPOSITION
DIRECT ENERGY CONVERTERS
DOCUMENT TYPES
ELECTRON MICROSCOPY
EQUIPMENT
FILMS
HYDRIDES
MICROSCOPY
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SOLAR EQUIPMENT
SURFACE COATING
SURFACE FINISHING
photovoltaics
solar cells
amorphous state
silicon
microscopes
film growth
360602* - Other Materials- Structure & Phase Studies
140501 - Solar Energy Conversion- Photovoltaic Conversion
400102 - Chemical & Spectral Procedures