Low energy ion beam systems for surface analytical and structural studies
Conference
·
OSTI ID:5455197
This paper reviews the use of low energy ion beam systems for surface analytical and structural studies. Areas where analytical methods which utilize ion beams can provide a unique insight into materials problems are discussed. The design criteria of ion beam systems for performing materials studies are described and the systems now being used by a number of laboratories are reviewed. Finally, several specific problems are described where the solution was provided at least in part by information provided by low energy ion analysis techniques.
- Research Organization:
- Sandia Labs., Albuquerque, NM (USA)
- DOE Contract Number:
- EY-76-C-04-0789
- OSTI ID:
- 5455197
- Report Number(s):
- SAND-79-2392C; CONF-800466-2; TRN: 80-008227
- Resource Relation:
- Conference: International conference on low energy ion beams 2, Bath, UK, 14 Apr 1980
- Country of Publication:
- United States
- Language:
- English
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