Metrology laboratory requirements for third-generation synchrotron radiation sources
Conference
·
OSTI ID:544694
New third-generation synchrotron radiation sources that are now, or will soon, come on line will need to decide how to handle the testing of optical components delivered for use in their beam lines. In many cases it is desirable to establish an in-house metrology laboratory to do the work. We review the history behind the formation of the Optical Metrology Laboratory at Brookhaven National Laboratory and the rationale for its continued existence. We offer suggestions to those who may be contemplating setting up similar facilities, based on our experiences over the past two decades.
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOE Office of Energy Research, Washington, DC (United States)
- DOE Contract Number:
- AC02-76CH00016
- OSTI ID:
- 544694
- Report Number(s):
- BNL-64766; CONF-970706-; ON: DE98001148; TRN: 97:005797
- Resource Relation:
- Conference: Annual meeting of the Society of Photo-Optical Instrumentation Engineers, San Diego, CA (United States), 27 Jul - 1 Aug 1997; Other Information: PBD: 1997
- Country of Publication:
- United States
- Language:
- English
Similar Records
Metrology of reflection optics for synchrotron radiation
MULTIPLE FUNCTIONS LONG TRACE PROFILER (LTP-MF) FOR NATIONAL SYNCHROTRON RADIATION LABORATORY OF CHINA.
Hybrid Metrology and 3D-AFM Enhancement for CD Metrology Dedicated to 28 nm Node and Below Requirements
Conference
·
Sun Sep 01 00:00:00 EDT 1985
·
OSTI ID:544694
MULTIPLE FUNCTIONS LONG TRACE PROFILER (LTP-MF) FOR NATIONAL SYNCHROTRON RADIATION LABORATORY OF CHINA.
Conference
·
Sun Jul 31 00:00:00 EDT 2005
·
OSTI ID:544694
+1 more
Hybrid Metrology and 3D-AFM Enhancement for CD Metrology Dedicated to 28 nm Node and Below Requirements
Journal Article
·
Thu Nov 10 00:00:00 EST 2011
· AIP Conference Proceedings
·
OSTI ID:544694
+2 more