An instrument for gravimetric calibration of flow devices with corrosive gases
An instrument was developed for the calibration of mass flow controllers primarily used in the production of semiconductor wafers. Almost all other types of such calibrators require measurement of temperature, pressure and volume. This instrument measures the weight of gas collected in a container and makes measuring those thermodynamic variables unnecessary. The need to measure the weight of the gas container is eliminated by submerging it in a liquid (presently water) and balancing its weight with the force of buoyancy. The accuracy of this Gravimetric Calibrator is unaffected by the pressure and temperature of the gas. The Calibrator can also measure reactive, corrosive, and non-ideal gases. The container remains connected to the process by a torsion capillary, and a load cell measures the changing gas weight continuously throughout the measuring process. A prototype was designed for gas flows ranging from 1 sccm of hydrogen to 10,000 sccm of tungsten hexafluoride, constructed, tested, and used to calibrate flow devices. Experience with the prototype and results are presented, and plans for further developments are discussed. Design of a version for the flow range from 0.1 sccm to 100 sccm is in progress.
- Research Organization:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 52825
- Report Number(s):
- CONF-9505201-2; ON: DE95009700; TRN: AHC29515%%96
- Resource Relation:
- Conference: 41. international instrumentation symposium, Auora, CO (United States), 7-11 May 1995; Other Information: PBD: [1995]
- Country of Publication:
- United States
- Language:
- English
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