Energetic neutral beam cleaning. Final CRADA report for CRADA number Y-1296-0427
- Lockheed Martin Energy Systems, Inc., Oak Ridge, TN (United States)
- GaSonics International, San Jose, CA (United States)
The purpose of this project is to evaluate the feasibility of cleaning silicon wafers with an energetic (1 to 100 eV) neutral particle beam and to develop a viable neutral beam source. A microwave plasma source on an existing test stand was modified to produce a 2-cm diameter neutral beam for cleaning the wafers. Significant results regarding neutral beam wafer cleaning are reported.
- Research Organization:
- Oak Ridge Y-12 Plant (Y-12), Oak Ridge, TN (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 515581
- Report Number(s):
- Y/AMT-412; ON: DE97008282; CRN: C/Y-12--96-0427; TRN: AHC29718%%96
- Resource Relation:
- Other Information: PBD: 31 Dec 1996
- Country of Publication:
- United States
- Language:
- English
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