Development of passive electronic components for instrumentation of improved geothermal logging tools and components. Annual progress report

Technical Report · Thu Oct 20 00:00:00 EDT 1977

DOI:https://doi.org/10.2172/5101794· OSTI ID:5101794

Raymond, L S; Hamilton, D J; Kerwin, W J

Short term objectives for well-logging instrumentation are circuits which can operate at temperatures in the range 275/sup 0/C to 350/sup 0/C; the medium term goal is operation up to 500/sup 0/C, and the long term goal is to achieve operation at 1000/sup 0/C. It is apparent that useful electronic circuits will require the combination of both passive components and active devices. In order to meet the compatibility requirements, the basic technology which has been selected in this project is the chemical vapor deposition of metal interconnections, resistor material, dielectric material and passivating material. It is to be emphasized that this is a thin-film, not thick-film, technology which is compatible with the processing methods used in fabricating either semiconductor or integrated thermionic devices, and produces components which are electrically compatible with those devices. The investigation in this project is primarily directed toward tungsten metallization, tungsten-silicon resistors, and silicon nitride dielectric and passivation.

• Research Organization: Univ. of Arizona, Tucson, AZ (United States)
• DOE Contract Number: EY-76-S-02-4081
• OSTI ID: 5101794
• Report Number(s): COO-4081-2
• Country of Publication: United States
• Language: English

Related Subjects

15 GEOTHERMAL ENERGY
47 OTHER INSTRUMENTATION
ELECTRONIC CIRCUITS
DESIGN
GEOTHERMAL WELLS
WELL LOGGING
CAPACITORS
CHEMICAL VAPOR DEPOSITION
DIELECTRIC MATERIALS
FILMS
HIGH TEMPERATURE
RESEARCH PROGRAMS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR RESISTORS
SILICON
SILICON NITRIDES
TUNGSTEN
VAPOR DEPOSITED COATINGS
VERY HIGH TEMPERATURE
CHEMICAL COATING
COATINGS
DEPOSITION
ELECTRICAL EQUIPMENT
ELEMENTS
EQUIPMENT
METALS
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
REFRACTORY METALS
RESISTORS
SEMIMETALS
SILICON COMPOUNDS
SURFACE COATING
TRANSITION ELEMENTS
WELLS
Geothermal Legacy