Large-area surface discharge UV light source for materials processing applications

Conference · Tue Apr 01 00:00:00 EST 1997

OSTI ID:503511

Sze, R C

Performance of 6 inches x 6 inches surface discharge that give integrated light intensities greater than 400 mJ/cm{sup 2} is reported here. Light uniformity on the surface of high density alumina dielectric has been measured to show better than 5% across the entire discharge area. Detailed spectroscopic content of these discharges in different gases and gas mixtures are presented from 160nm to 735 nm region.

• Research Organization: Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-36
• OSTI ID: 503511
• Report Number(s): LA-UR-97-520; CONF-970231-26; ON: DE97004789; TRN: 97:004470
• Resource Relation: Conference: SPIE international symposium, San Jose, CA (United States), 8-14 Feb 1997; Other Information: PBD: 1997
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
MATERIALS
PROCESSING
SURFACE TREATMENTS
LIGHT SOURCES
ULTRAVIOLET RADIATION
GASES
SPECTRA
KRYPTON
ARGON
ENERGY DENSITY
ANNEALING
THIN FILMS