Magnetically-excited flexural plate wave device

Technical Report · Thu May 01 00:00:00 EDT 1997

DOI:https://doi.org/10.2172/474933· OSTI ID:474933

Butler, M A; Martin, S J; Spates, J J; Mitchell, M A

Novel devices have been designed, fabricated, and tested that use the Lorentz force to excite flexural plate waves in a silicon nitride membrane. Single and dual port devices have been fabricated and the excitation spectra measured. Eigenmodes of the membrane are excited in this resonant device and non-linear effects, due to amplitude stiffening of the membrane, are observed. The effects of temperature and ambient gas on resonant frequency and Q have been explored. These devices have the advantage of material compatibility with silicon process technology and are capable of operating at very high temperatures.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 474933
• Report Number(s): SAND-97-0256C; CONF-970646-9; ON: DE97005368; TRN: AHC29711%%103
• Resource Relation: Conference: 9. international conference on solid-state sensors and actuators, Chicago, IL (United States), 16-19 Jun 1997; Other Information: PBD: [1997]
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
MEASURING INSTRUMENTS
FABRICATION
MINIATURIZATION
RESONATORS
DESIGN
TEMPERATURE DEPENDENCE
LORENTZ FORCE
EXPERIMENTAL DATA