Fabricating micro-instruments in surface-micromachined polycrystalline silicon
- Air Force Phillips Lab., Kirtland AFB, NM (United States). Space Mission Technology Div.
- Sandia National Labs., Albuquerque, NM (United States)
Smaller, lighter instruments can be fabricated as Micro-Electro-Mechanical Systems (MEMS), having micron scale moving parts packaged together with associated control and measurement electronics. Batch fabrication of these devices will make economical applications such as condition-based machine maintenance and remote sensing. The choice of instrumentation is limited only by the designer`s imagination. This paper presents one genre of MEMS fabrication, surface-micromachined polycrystalline silicon (polysilicon). Two currently available but slightly different polysilicon processes are presented. One is the ARPA-sponsored ``Multi-User MEMS ProcesS`` (MUMPS), available commercially through MCNC; the other is the Sandia National Laboratories ``Sandia Ultra-planar Multilevel MEMS Technology`` (SUMMiT). Example components created in both processes will be presented, with an emphasis on actuators, actuator force testing instruments, and incorporating actuators into larger instruments.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE Office of Financial Management and Controller, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 468577
- Report Number(s):
- SAND-97-0718C; CONF-970546-2; ON: DE97004034; TRN: AHC29710%%72
- Resource Relation:
- Conference: 43. annual international instrumentation symposium of the Aerospace Industries and the Test Measurement Divisions of the Instrument Society of America, Orlando, FL (United States), 4-8 May 1997; Other Information: PBD: [1997]
- Country of Publication:
- United States
- Language:
- English
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