Synthesis of mullite coatings by chemical vapor deposition
- Boston Univ., MA (United States)
Formation of mullite on ceramic substrates via chemical vapor deposition was investigated. Mullite is a solid solution of Al{sub 2}O{sub 3} and SiO{sub 2} with a composition of 3Al{sub 2}O{sub 3}{circ}2SiO{sub 2}. Thermodynamic calculations performed on the AlCl{sub 3}-SiCl{sub 4}-CO{sub 2}-H{sub 2} system were used to construct equilibrium CVD phase diagrams. With the aid of these diagrams and consideration of kinetic rate limiting factors, initial process parameters were determined. Through process optimization, crystalline CVD mullite coatings have been successfully grown on SiC and Si{sub 3}N{sub 4} substrates. Results from the thermodynamic analysis, process optimization, and effect of various process parameters on deposition rate and coating morphology are discussed.
- Research Organization:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 458939
- Report Number(s):
- ORNL/FMP-96/1; CONF-9605167-; ON: DE97050349; CNN: Contract SC-19X-SS110C; TRN: 97:001933-0006
- Resource Relation:
- Journal Volume: 11; Journal Issue: 06; Conference: 10. annual conference on fossil energy materials, Knoxville, TN (United States), 14-16 May 1996; Other Information: PBD: Aug 1996; Related Information: Is Part Of Proceedings of the tenth annual conference on fossil energy materials; Cole, N.C.; Judkins, R.R. [comps.]; PB: 551 p.
- Country of Publication:
- United States
- Language:
- English
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