Properties variation with composition of single-crystal Pb(Zr{sub x}Ti{sub 1-x})O{sub 3} thin films prepared by MOCVD
- Argonne National Lab., IL (United States)
- Hewlett Packard Laboratories, Palo Alto, CA (United States)
Single-crystal thin films covering the full range of PZT 0{le}x{le}1 have been deposited by metal-organic chemical vapor deposition (MOCVD). The films were grown on epitaxial, RF-sputter-deposited SrRuO{sub 3} thin film electrodes on (001) SrTiO{sub 3} substrates. X-ray diffraction, energy-dispersive electron spectroscopy and optical waveguiding were used to characterize the crystalline structure, composition, refractive index, and film thickness. We found that the PZT films were single-crystalline for all compositions exhibiting cube-on-cube epitaxy with the substrate with very high degrees of crystallinity and orientation. We report the systematic variations in the optical, dielectric, polarization, and transport properties as a function of composition and the epitaxy-induced modifications in the solid-solution phase diagram of this system. These films exhibited electronic properties which showed clear systematic variations with composition. High values of remnant polarization (30--55 {mu}C/cm{sup 2}) were observed at all ferroelectric compositions. Unlike previous studies, the dielectric constant exhibited a clear dependence on composition with values ranging from 225--650. Coercive fields decreased with increasing Zr concentration to a minimum of 20 kV/cm at the (70/30) composition. In addition, these films exhibited both high resistivity and dielectric-breakdown strength ({approximately}10{sup 13} {Omega}-cm at 100 kV/cm and >300 kV/cm, respectively) without any compensative doping.
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 206615
- Report Number(s):
- ANL/MSD/CP-88817; CONF-951155-78; ON: DE96007397
- Resource Relation:
- Conference: Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 27 Nov - 1 Dec 1995; Other Information: PBD: Dec 1995
- Country of Publication:
- United States
- Language:
- English
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