Ferroelectric microelectronic devices utilizing NbN / Nb electrodes with thin film ferroelectric (Hf,Zr)O2.
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- NA0003525
- OSTI ID:
- 2006289
- Report Number(s):
- SAND2022-16853C; 712471
- Resource Relation:
- Conference: Proposed for presentation at the AVS Workshop on Innovative Nanoscale Devices and Systems held December 5-9, 2022 in Lihue, Kauai.
- Country of Publication:
- United States
- Language:
- English
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